HIGH PURITY PUMPS
FF / FF-H Series Pneumatic Drive Bellows Pump
- Max. Capacity: 11.6 GPH / 45 LPM
- Max. Pressure: 250 PSI
- Strokes per minute: 140 SPM
- Liquid Temperature Range: 5-180° C
FA Series – Pneumatic Drive Bellows Pump
- Max. Capacity: 10.6 GPH / 20 LPM
- Max. Pressure: 57 PSI
- Strokes per minute: 150 SPM
- Liquid Temperature Range: 5-100° C
FS Series – Pneumatic Drive Bellows Pump
- Max. Capacity: 14.5 GPH / 55 LPM
- Max. Pressure: 75 PSI
- Strokes per minute: 240 SPM
- Liquid Temperature Range: 5-180° C
FLP-60W Series Low Pulsation Bellows Pump
- Max. Capacity: 13.2 GPH / 50 LPM
- Max. Pressure: 72.5 PSI
- Strokes per minute: 160 SPM
- Liquid Temperature Range: 5-180° C
PDS Series Photoresist Dispensing System
- Max. Capacity: 5 mL/shot
- Max. Pressure: 0.15 MPa
- Liquid Temperature Range: 15-25° C
CFD Chemical Replenishing Pump
- Max. Capacity: 1 mL/shot
- Max. Pressure: 7.25 PSI
- Strokes per minute: 30 SPM
- Liquid Temperature Range 5-180° C